QCVelox-HR
(In stock)
| Product Name | QCVelox-HR |
| Model Number | QCVelox-HR |
| Brand | Bruker |
| Category | X-ray Metrology / Semiconductor / Compound Semiconductor Inspection Equipment |
| Country Origin | USA |
| Material | High precision X-ray optics, detectors, mechanical stages, vacuum/low-vacuum system components. |
| Applications | High-resolution X-ray metrology of compound semiconductor wafers, layers, films (e.g. III-V semiconductors, epitaxial layers). |
QCVelox-HR is the highest productivity high-resolution X-ray diffraction (HRXRD) and X-ray reflectivity (XRR) metrology system for complex epilayer structures. HRXRD measures the crystal quality, strain, relaxation, and thickness of the epilayers, while XRR determines their thickness, density, and surface roughness. QCVelox-HR features full automation and factory integration software for production line metrology. Once data is collected, Bruker’s powerful analysis software accurately and reliably gives epilayer process parameters, with automatic reporting and immediate feedback to control and monitor production lines.
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