Paramount RF Generator
(In stock)
| Product Name | Paramount RF Generator |
| Model Number | Paramount (HF) RF Generator series |
| Brand | Advanced Energy |
| Category | RF Plasma Generator / RF Power-Delivery System for plasma processes |
| Country Origin | United States |
| Material | Hybrid cooling (air + water), standard rack-mount enclosure (half or full rack, 3U height) . |
| Applications | RF power supply for plasma generation in semiconductor manufacturing (etch, deposition, PECVD/PVD, chamber cleaning), thin-film processing, dielectric & conductor etching, sputtering, and other industrial plasma processes requiring high plasma density and ion energy. |
Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
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