Apex RF Generator
(In stock)
| Product Name | Apex RF Generator |
| Model Number | Apex (RF Plasma Generator / Power-Delivery System) |
| Brand | Advanced Energy |
| Category | RF Plasma Generator / RF Power Supply for plasma and thin-film processes |
| Country Origin | United States |
| Material | Water-cooled RF power delivery unit; modular / compact enclosure supporting multiple mount styles (chamber mount, rack-mount, shoebox, on-tool frame mount) . |
| Applications | Plasma generation for semiconductor manufacturing, thin-film deposition (PVD/PECVD), etching, chamber cleaning, flat panel display manufacturing, data storage devices, solar cell thin-film processing, HDP-CVD, PEALD/ALE — broadly plasma-based, thin-film and surface processing applications. |
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
Looks like there are no reviews yet.
