Thermal flow meters are devices that measure flow rate by utilizing the correlation between the amount of heat carried away by the flow and the mass flow rate. In these types of flow meters, flow velocity sensors are placed in the flow path or in the case of bypass types, the main flow paths or capillary tubes are heated.
Usable for various applications, our thermal flowmeters provide a diverse lineup of types to suit specific needs.

Thermal flowmeter
Wide lineup of pipe-insertion types and in-line types compatible with large diameters.
Applicable for low-pressure conditions, biogas, high-purity gases and utility gases.
Suitable for applications such as air conditioning systems, waste incineration facilities and gas supply equipment.

Thermal mass flowmeter
Thermal mass flowmeters can measure the flow rates of various gases without being affected by changes in temperature or pressure.

Wide lineup of two types:
High-precision bypass split type
Full-flow type with a wide flow range.
Suitable for semiconductor manufacturing processes, analytical equipment, gas supply lines and more.

Thermal mass flow controller
Flow controllers combined thermal mass flow meters with control valves.