Wide lineup of flow meters and flow controllers suitable for integration into semiconductor manufacturing equipment, chemical solution systems, ultrapure water systems and more.

Ultrasonic Flowmeter

Ultrasonic flow meters made of fluororesin that can measure small liquid flow rates of ultrapure water and various chemicals without moving parts and with no contact between the sensor and the liquid.
With a diverse lineup, you can choose according to your application.

・Clamp-on type
・High precision type
・Flow Monitors
・Micro flow type
・High temperature type

Vortex Flow Sensor
Flow sensors that measure flow rate by detecting the number of vortices (Kármán vortices) generated downstream of a vortex generator placed in the flow path.
Available two types, fluororesin models and PPS resin models.

Flow Controller
Flow controllers with fluororesin wetted parts capable of controlling small to micro flow rates of pure water, ultrapure water, various chemical solutions, etc.
The lineup includes an all-in-one integrated type and a separate type with high installation flexibility.